When two or more phases with similar crystal structure but different chemistry are present in a material then a combination of EDS and EBSD are required to discriminate such phases.

Integrated EDS/EBSD in AZtec software provides a convenient solution to this problem, where EDS spectra and EBSPs can be acquired simultaneously to quantify the elements present, search databases for candidate phases to match composition and crystal structure.

These data/phases can then be used to map the area of interest for both chemistry and crystal orientation, to provide a distribution of the different phases by chemistry and crystal structure. Phases with similar crystal structure but different chemistry can be discriminated off-line.

You can see a demo of simultaneous EDS/EBSD here.

The following are application notes for simultaneous EBSD/EDS.

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